Glancing Angle Deposition

Designing Nanostructures by Glancing Angle Deposition

Three-dimensional nanostructures can be fabricated by the glancing angle deposition technique. By rotating the substrate in both polar and azimuthal directions, one can fabricate desired nanostructures, such as nanorod arrays with different shapes, nanospring arrays, and even multilayer nanostructures. This method offers a fully three-dimensional control of the nanostructure with additional cap...

Hydrophobic Metallic Nanorods coated with Teflon Nanopatches by Glancing Angle Deposition

Introducing a hydrophobic property to vertically aligned hydrophilic metallic nanorods was investigated experimentally and theoretically. First, platinum nanorod arrays were deposited on flat silicon substrates using a sputter Glancing Angle Deposition Technique (GLAD). Then a thin layer of Teflon (nanopatches) was partially deposited on the tips of platinum nanorod at a glancing angle of θ = 8...

Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au a...

Control of Nano-Structure of Photocatalytic TiO2 Films by Oxygen Ion Assisted Glancing Angle Deposition

Fabrication of Ni-silicide/Si heterostructured nanowire arrays by glancing angle deposition and solid state reaction

This work develops a method for growing Ni-silicide/Si heterostructured nanowire arrays by glancing angle Ni deposition and solid state reaction on ordered Si nanowire arrays. Samples of ordered Si nanowire arrays were fabricated by nanosphere lithography and metal-induced catalytic etching. Glancing angle Ni deposition deposited Ni only on the top of Si nanowires. When the annealing temperatur...